Method and apparatus for verifying microcircuit fabrication proc

Details Method and apparatus for verifying microcircuit fabrication proc Method and apparatus for verifying microcircuit fabrication proc

1990-02-09

1992-06-09

Lall, Parshotam S.

Boots, shoes, and leggings

364490, G06F 1520

Patent

active

051213354

ABSTRACT:
An apparatus is used to perform a fabrication procedure on a microcircuit under control of specification data. In a preferred embodiment of the invention, the procedure includes making relatively undetectable modifications to the microcircuit using a focussed ion beam to deter unauthorized reproduction and/or use of the microcircuit. The output of the apparatus is tapped during the procedure to generate record data of the signals actually applied to control the focussed ion beam to perform the procedure. The record data is written into at least one verification data storage area of the microcircuit, preferably using the focussed ion beam. During testing of the microcircuit, the generated data which was written into the storage area is read out and compared with the specification data. Proper performance of the procedure is verified if the specification data and record data correspond to each other.

REFERENCES:
patent: 4766516 (1988-08-01), Ozdemir et al.
patent: 4984282 (1991-01-01), Manns et al.
patent: 4985927 (1991-01-01), Norwood et al.

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