Method and apparatus for varying wafer spacing

Details Method and apparatus for varying wafer spacing Method and apparatus for varying wafer spacing

1990-12-14

1993-02-23

Werner, Frank E.

Material or article handling

Device for emptying portable receptacle

For emptying contents thereof into portable receiving means

414416, 414417, 414917, 414680, 118500, B65G 6500

Patent

active

051884992

ABSTRACT:
A wafer handling apparatus having a variable pitch includes a supporting surface (12) for holding a boat (14) in a predetermined location. An elevator mechanism (20) is operable to move upward through the boat to lift wafers (16) upward into intermediate restraining combs (24) and (26). Combs (22) are disposed on the elevator mechanism (20) for holding the wafers (16) on the edges thereof. The combs (22) can have the pitch thereof varied by the operation of a cylinder (56). The combs (22) have two rotating brackets (42) and (40) disposed on the sides thereof. The brackets (42) and (40) are pivoted on an elevator bracket (28) at points (44) and (46). When the lower bracket (40) is reciprocated upward by the cylinder (56) and the associated rod (54), the space between the combs (22) decreases.

REFERENCES:
patent: 4215967 (1980-08-01), McGill et al.
patent: 4257727 (1981-03-01), Peyton
patent: 4568234 (1986-02-01), Lee et al.
patent: 4856957 (1989-08-01), Lau et al.
patent: 4938655 (1990-07-01), Asano
patent: 4987407 (1991-01-01), Lee
patent: 5007788 (1991-04-01), Asano et al.

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