Cleaning and liquid contact with solids – Processes – With treating fluid motion
Reexamination Certificate
2005-06-14
2005-06-14
Kornakov, M. (Department: 1746)
Cleaning and liquid contact with solids
Processes
With treating fluid motion
C134S002000, C134S003000, C134S031000, C510S175000
Reexamination Certificate
active
06905556
ABSTRACT:
A method of delivering a reagent to a wafer is provided. A solvent is provided. A set of conditions of temperature and pressure is provided to the solvent, which is sufficient to bring the solvent to supercritical conditions. A reagent is provided. A surfactant is provided, where the surfactant has a first moiety with an affinity for the solvent and a second moiety with an affinity for the reagent, where the surfactant increases the concentration of the reagent that may be carried by the solvent. The solvent, surfactant, and reagent are combined to form a solution. The solution is delivered to a supercritical process chamber, wherein a wafer is exposed to the solution in the process chamber.
REFERENCES:
patent: 5683977 (1997-11-01), Jureller et al.
patent: 5783082 (1998-07-01), DeSimone et al.
patent: 5866005 (1999-02-01), DeSimone et al.
patent: 5868856 (1999-02-01), Douglas et al.
patent: 5868862 (1999-02-01), Douglas et al.
patent: 5944996 (1999-08-01), DeSimone et al.
patent: 6024801 (2000-02-01), Wallace et al.
patent: 6187383 (2001-02-01), McClain et al.
patent: 6224774 (2001-05-01), DeSimone et al.
patent: 6228826 (2001-05-01), DeYoung et al.
patent: 6242165 (2001-06-01), Vaartstra
patent: 2002/0046707 (2002-04-01), Biberger et al.
patent: 2002/0112740 (2002-08-01), DeYoung et al.
patent: 2002/0112746 (2002-08-01), DeYoung et al.
patent: 2002/0179126 (2002-12-01), DeYoung et al.
patent: 2003/0125225 (2003-07-01), Xu et al.
patent: S64-45131 (1989-02-01), None
Hawley's Condensed Chemical Dictionary. John Wiley & Sons, Inc. pp. 151,240, 1997.
U.S. Appl. No. 10/067,520, filed Feb. 5, 2002.
U.S. Appl. No. 10/202,987, filed Jul. 23, 2002.
Banerjee Souvik
Hess Dennis W.
Humayun Raashina
Joyce Patrick C.
Myneni Satyanarayana
Beyer Weaver & Thomas LLP
Kornakov M.
Novellus Systems Inc.
LandOfFree
Method and apparatus for using surfactants in supercritical... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for using surfactants in supercritical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for using surfactants in supercritical... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3493163