Method and apparatus for uniformizing output signal levels...

Details Method and apparatus for uniformizing output signal levels... Method and apparatus for uniformizing output signal levels...

2005-02-01

2005-02-01

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Combined

C073S514180, C324S259000

Reexamination Certificate

active

06848317

ABSTRACT:
The present invention is an apparatus and method for making output signal (AC voltage) levels of MEMS capacitive sensors uniform, each including a microstructure being displaced by a certain force and a fixed electrode for detecting capacitance variation caused by gap size difference between the microstructure and the fixed electrode, the apparatus and method comprising so as to apply actuating current of a predetermined frequency to the microstructure, output a sensing signal of the fixed electrode while receiving a reference offset voltage, compare an RMS level of the sensing signal with a preset RMS level, and then adjust the reference offset voltage of the fixed electrode so that the sensing signal made equal to a target level.

REFERENCES:
patent: 5445006 (1995-08-01), Allen et al.
patent: 6071819 (2000-06-01), Tai et al.
patent: 6705165 (2004-03-01), Garverick et al.
patent: 20030140698 (2003-07-01), Garverick et al.

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