Method and apparatus for ultrasonic scanning of a...

Details Method and apparatus for ultrasonic scanning of a... Method and apparatus for ultrasonic scanning of a...

2004-05-24

2010-02-16

Saint Surin, J M (Department: 2856)

Measuring and testing

Vibration

By mechanical waves

C073S618000, C073S622000

Reexamination Certificate

active

07661315

ABSTRACT:
A method and apparatus for ultrasonic scanning of a wafer assembly is disclosed. The wafer assembly is held in a wafer chuck and rotated. A transducer generates ultrasound in the wafer assembly and the ultrasound emitted from the wafer assembly is sensed. A controller adjusts the relative positions of the wafer and the transducer and controls the transducer to generate ultrasound at a number of scan points.

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