Method and apparatus for ultrasonic laser testing

Details Method and apparatus for ultrasonic laser testing Method and apparatus for ultrasonic laser testing

2003-08-05

2008-12-09

Lee, Hwa (Andrew) S (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S432000

Reexamination Certificate

active

07463363

ABSTRACT:
The present invention for detecting ultasonic displacements includes a detection laser to generate a first pulsed laser beam to generate the ultrasonic surface displacements on a surface of the target. A seocond pulsed laser beam to detect the ultrasonic surface displacements on a surface of the target. Collection optics to collect phase modulated light from the first pulsed laser beam either reflected or scattered by the target. An interferometer which processes the phase modulated light and generate at least one output signal. A processor that processes the at least one output signal to obtain data representative of the ultrasonic surface displacements at the target.

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