Method and apparatus for treatment of NF.sub.3 gas

Details Method and apparatus for treatment of NF.sub.3 gas Method and apparatus for treatment of NF.sub.3 gas

1992-01-30

1993-01-05

Niebling, John

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

Halogenous component

55 75, 55 71, 423406, C01B 21083, B01D 5304

Patent

active

051768895

ABSTRACT:
In accordance with this invention, a waste gas containing toxic NF.sub.3 gas is contacted with a honeycomb structure of a carbonaceous material to thereby convert NF.sub.3 into nontoxic CF.sub.4 and H.sub.2 gases with high efficiency.

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patent: 4215096 (1980-07-01), Sinha et al.
patent: 4673558 (1987-06-01), Senoue et al.
patent: 4820681 (1989-04-01), Chang et al.
patent: 4933158 (1990-06-01), Aritsuka et al.
patent: 4948571 (1990-08-01), Harada et al.

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