Method and apparatus for treatment of NF.sub.3 gas

Details Method and apparatus for treatment of NF.sub.3 gas Method and apparatus for treatment of NF.sub.3 gas

1993-10-18

1995-03-28

Warden, Robert J.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Waste gas purifier

422171, 422174, 422181, 423240S, 4232451, 423406, 502439, 502527, B01D 5000, C01B 700, B01J 800, B01J 2104

Patent

active

054014735

ABSTRACT:
In accordance with this invention, a waste gas containing toxic NF.sub.3 gas is contacted with a honeycomb structure of a carbonaceous material to thereby convert NF.sub.3 into nontoxic CF.sub.4 and N.sub.2 gases with high efficiency.

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