Chemistry of inorganic compounds – Modifying or removing component of normally gaseous mixture – Halogenous component
Reexamination Certificate
2011-07-05
2011-07-05
Kastler, Scott (Department: 1733)
Chemistry of inorganic compounds
Modifying or removing component of normally gaseous mixture
Halogenous component
C423S24000R, C423S246000, C423S247000, C422S173000, C422S177000
Reexamination Certificate
active
07972582
ABSTRACT:
An apparatus for treating an exhaust gas that includes a pre-treatment section that removes a powdery component, a water-soluble component or a hydrolytic component from the exhaust gas. The exhaust gas contains a fluorine compound and CO. A heating oxidative decomposing section performs heating oxidative decomposition of at least one of the fluorine compound and CO to detoxify the exhaust gas. The apparatus also has a post-treatment section for post-treating an acid gas such as HF which has been produced by the heating oxidative decomposition.
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Aono Hiroshi
Mori Yoichi
Shinohara Toyoji
Shirao Yuji
Suzuki Yasuhiko
Ebara Corporation
Kastler Scott
Velasquez Vanessa
Wenderoth , Lind & Ponack, L.L.P.
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