Method and apparatus for treating a substrate

Details Method and apparatus for treating a substrate Method and apparatus for treating a substrate

1991-10-17

1995-08-01

McFarlane, Anthony

Cleaning and liquid contact with solids

Processes

With treating fluid motion

134 2, 134 48, 134117, 134122R, 204 111, 204194, 430434, 216 23, 216 99, 1566621, B08B 304

Patent

active

054377331

ABSTRACT:
A plane of a treatment liquid holder having a number of through holes faces a treatment surface of a substrate. A treatment liquid is held between the treatment surface and the liquid holder by utilizing a surface tension of the treatment liquid. Since the treatment liquid is applied only to the treatment surface, an extremely small amount of treatment liquid suffices for the treatment. In addition, since a fresh treatment liquid can be used in every treatment, cross-contamination is suppressed and the treatment can be performed with safety at a low cost.

REFERENCES:
patent: 4187868 (1980-02-01), Rudolph
patent: 4519846 (1985-05-01), Aigo
patent: 4749440 (1988-06-01), Blackwood et al.
patent: 4857211 (1989-08-01), Nineuil et al.
patent: 4997490 (1991-03-01), Vetter et al.

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