Drying and gas or vapor contact with solids – Process – Gas or vapor pressure varies during treatment
Patent
1999-03-23
2000-08-15
Gravini, Stephen
Drying and gas or vapor contact with solids
Process
Gas or vapor pressure varies during treatment
34410, 34417, 34467, 34 72, 34210, 438 14, F26B 504
Patent
active
06101740&
ABSTRACT:
In one embodiment, a cart (5) having a first vessel (10) which fits within a second vessel (90) is used to transport and store an integrated circuit substrate. The integrated circuit substrate is placed within the first vessel (10) and the door (18) of the first vessel (10) is closed and sealed against a door seal (24). The first vessel (10) is then purged with nitrogen to expel moisture and reactive gases from the interior of the first vessel (10). After purging, the first vessel (10) is then placed within the second vessel (90). The door (102) of the second vessel (90) is then closed and sealed against a door seal (104). The second vessel (90) is then purged with nitrogen to expel moisture and reactive gases from the interior of the second vessel (90). The cart (5) containing the integrated circuit substrate is then transported to the next manufacturing area. Integrated circuits and other articles may be manufacturing using the cart system of the present invention.
REFERENCES:
patent: 4850380 (1989-07-01), Koslow
patent: 5370491 (1994-12-01), Bonora et al.
patent: 5482161 (1996-01-01), Williams et al.
patent: 5829939 (1998-11-01), Iwai et al.
patent: 5848933 (1998-12-01), Roberson, Jr. et al.
patent: 5902088 (1999-05-01), Fairbairn et al.
Makhamreh Khalid
Miller Jeffrey
Tannous Adel George
Allied-Signal Inc.
Gravini Stephen
LandOfFree
Method and apparatus for transporting articles does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for transporting articles, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for transporting articles will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1995067