Method and apparatus for transferring wafers from wafer carrier

Details Method and apparatus for transferring wafers from wafer carrier Method and apparatus for transferring wafers from wafer carrier

1992-03-23

1993-12-14

Huppert, Michael S.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414222, 414331, 414786, 414938, B65G 4907

Patent

active

052696430

ABSTRACT:
A method of taking out and transferring a plurality of wafers from each of a plurality of wafer carriers to a wafer conveyor robot includes the steps of taking out wafer groups inside the wafer carriers from respective wafer carriers and aligning the same on a straight line with respective wafer groups being spaced apart, shifting at least one of the wafer groups so that an interval between the spaced wafer groups becomes equal to intervals among the wafers in each of wafer groups, and holding the shifted wafer groups with the wafer conveyor robot. An apparatus for practicing this method is also disclosed.

REFERENCES:
patent: 4566839 (1986-01-01), Butler
patent: 4568234 (1986-02-01), Lee et al.
patent: 4611966 (1986-09-01), Johnson
patent: 4662811 (1987-05-01), Hayden
patent: 4701096 (1987-10-01), Fisher, Jr.
patent: 4806057 (1989-02-01), Cay et al.
patent: 4840530 (1989-06-01), Nguyen
patent: 4938655 (1990-07-01), Asano
patent: 4955775 (1990-09-01), Ohkase et al.
patent: 5110248 (1992-05-01), Asano et al.
patent: 5131799 (1992-07-01), Nishi et al.
Semiconductor World, Mar. 1991, pp. 149-152 and p. 162.

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