Method and apparatus for transferring substrates

Conveyors: power-driven – Conveyor system for moving a specific load as a separate unit – System includes a rotating or endless carrier with a load...

Reexamination Certificate

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C198S471100, C198S803140

Reexamination Certificate

active

11045217

ABSTRACT:
The present invention is directed to a method for transferring substrates by receiving a first substrate at a first substrate receiving station in a first transfer unit capable of holding at least two substrates, moving the first transfer unit containing only the first substrate along a conveying line to a second substrate receiving station, causing the first transfer unit to receive a second substrate at the second substrate receiving station; and transferring the first and second substrates simultaneously to a substrate transfer station.

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