Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
2007-07-24
2007-07-24
Mackey, Patrick (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
C414S672000, C414S939000
Reexamination Certificate
active
10801007
ABSTRACT:
A transferring apparatus transfers an article to be processed, which is carried by a carrier device, to a holder provided in a processing chamber defined by a processing vessel and adapted to hold the article at a specified processing position. The transferring apparatus includes a temporarily holding member, and transfers the article from the intermediate position to the processing position after receiving the article carried by the carrier device at an intermediate position distanced from the holder and temporarily holding it. The temporarily holding member is retracted to a position in the outside of the processing vessel after the article is transferred.
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Adachi Hideki
Fukatsu Eiji
Sarumaru Shogo
Ueno Hiroyuki
Watanabe Katsumi
Dainippon Screen Mfg. Co,. Ltd.
Greenhut Charles
Kabushiki Kaisha Kobe Seiko Sho
Mackey Patrick
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
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