Method and apparatus for transfer of a reticle pattern onto a su

Details Method and apparatus for transfer of a reticle pattern onto a su Method and apparatus for transfer of a reticle pattern onto a su

1994-03-14

1998-11-10

Malley, Daniel P.

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 355 71, G03B 3742

Patent

active

058351957

ABSTRACT:
A system and method for transferring a reticle (201) pattern to a substrate image (203) by scanning. The reticle is placed between an illumination system (118) and the projection lens (117). The substrate is located below the projection lens. A loading system, wafer adjustment system, and focusing system are also disclosed.

REFERENCES:
patent: 4924257 (1990-05-01), Jain
patent: 5187519 (1993-02-01), Takabayashi et al.
patent: 5204711 (1993-04-01), Takubo et al.
patent: 5281996 (1994-01-01), Bruning et al.
patent: 5285236 (1994-02-01), Jain
patent: 5291240 (1994-03-01), Jain

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