Method and apparatus for transfer of a reticle pattern onto a su

Details Method and apparatus for transfer of a reticle pattern onto a su Method and apparatus for transfer of a reticle pattern onto a su

1997-10-14

2000-02-29

Epps, Georgia

Photocopying

Projection printing and copying cameras

Step and repeat

355 67, 356399, 356400, 356401, G03B 2742

Patent

active

060315970

ABSTRACT:
A system and method for reproducing isolated images over an entire substrate, by creating multiple adjacent scanned strips of whole images using a unity magnification scanning photolithographic system.

REFERENCES:
patent: 5298939 (1994-03-01), Swanson et al.
patent: 5495279 (1996-02-01), Sandstrom
patent: 5617182 (1997-04-01), Wakamoto et al.
patent: 5659383 (1997-08-01), Ozawa
patent: 5677754 (1997-10-01), Makinouchi
patent: 5726739 (1998-03-01), Hayata
patent: 5781277 (1998-07-01), Iwamoto
patent: 5822043 (1998-10-01), Ebinuma

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