Method and apparatus for tracking reticle history

Details Method and apparatus for tracking reticle history Method and apparatus for tracking reticle history

2007-03-20

2007-03-20

Von Buhr, M. N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S175000, C707S793000

Reexamination Certificate

active

11278589

ABSTRACT:
A method includes storing data associated with a plurality of reticles. Reticle history information is received. The reticle history information is linked to a selected reticle. The linked reticle history information is stored. A reticle information system includes a reticle database and a loader. The reticle database is operable to store data associated with a plurality of reticles. The loader is operable to receive reticle history information, link the reticle history information to a selected reticle, and store the linked reticle history information in the reticle database.

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