Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-06-15
2008-11-04
Chowdhury, Tarifur R (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S510000, C356S520000
Reexamination Certificate
active
07446883
ABSTRACT:
A Fizeau or other interferometer is used to provide high resolution, in-situ calibration of an external angle measurement system such as widely spaced high stability plane mirror interferometers (HSPMIs)). The calibrated measurement system then measures mechanical tilt during shearing. The tilt data is used to correct the sheared data, preferably before computation of the rotationally invariant (RI) terms. Alternatively, the data may be used to compute the spurious quadratic term and correct after integration.
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Evans Christopher James
Kuhn William P.
Caufield Francis J.
Chowdhury Tarifur R
LaPage Michael
Zygo Corporation
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