Method and apparatus for throttling gas flow to a cryopump

Details Method and apparatus for throttling gas flow to a cryopump Method and apparatus for throttling gas flow to a cryopump

1985-06-10

1986-09-16

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

62268, 55269, 417901, B01D 800

Patent

active

046114670

ABSTRACT:
Orifices in a cooled plate throttle gases entering a cryopump. Selected orifices are closed by removable closures such as spring clips to allow the throttling to be varied.

REFERENCES:
patent: 4285710 (1981-08-01), Welch
patent: 4449373 (1984-05-01), Peterson et al.

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