Method and apparatus for three-dimensional spectrally...

Optics: measuring and testing – By light interference – For dimensional measurement

Reexamination Certificate

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C356S456000, C356S511000

Reexamination Certificate

active

07551293

ABSTRACT:
A method and apparatus for providing information associated with at least one portion of a sample can be provided. For example, at least one wavelength of electro-magnetic radiation provided on a sample can be encoded to determine at least one transverse location of the portion. A relative phase between at least one first electro-magnetic radiation electro-magnetic radiation being returned from a sample and at least one second electro-magnetic radiation returned from a reference can be obtained to determine at least one relative depth location of the portion. Further, the information of the portion can be provided based on the transverse location and the relative depth location. For example, the information can be depth information and/or three-dimensional information associated with the portion of the sample.

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