Optics: measuring and testing – By light interference – Using fiber or waveguide interferometer
Reexamination Certificate
2005-03-29
2005-03-29
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
Using fiber or waveguide interferometer
Reexamination Certificate
active
06873419
ABSTRACT:
Laser ablation combined with spectrometric analysis is a good tool for determining the composition of heterogeneous materials. By measuring the depth of an ablation crater at a target of a heterogeneous material, it is possible to generate a compositional profile as a function of the depth. It is also possible to generate a 3 dimensional profile by depth profiling of a plurality of craters. The depth measurement is conducted in situ and in real time so that the evolution of composition as a function of the depth can be measured. An interferometric technique with a short coherence length light is one of the preferred embodiments for measuring the depth in situ and in real time.
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Detalle Vincent
Dufour Marc
Monchalin Jean-Pierre
Sabsabi Mohamad
St-Onge Louis
Freedman & Associates
National Research Council of Canada
Turner Samuel A.
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