Method and apparatus for thin film solar cell manufacturing

Details Method and apparatus for thin film solar cell manufacturing Method and apparatus for thin film solar cell manufacturing

2006-10-24

2010-11-16

Smith, Matthew S (Department: 2823)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S084000, C438S102000, C257SE21068, C257SE21462

Reexamination Certificate

active

07833821

ABSTRACT:
The present invention provides a method of making a Cu—In—Ga sputtering target by melting Cu, In and Ga, Cu and In or Cu and Ga to form a uniform melt with a pre-determined stoichiometry, which melt is sprayed to cause sprayed uniform melt particles to solidify into Cu—In—Ga particles with the pre-determined stoichiometry. The sputtering target is then made using the Cu—In—Ga particles. In a further aspect of the invention, there is provided a method of producing a thin film absorber layer for solar cell fabrication by sputter depositing a precursor film with a first composition

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