Method and apparatus for thickness measurement

Details Method and apparatus for thickness measurement Method and apparatus for thickness measurement

2007-12-06

2011-11-22

Ton, Tri T (Department: 2877)

Optics: measuring and testing

Dimension

Thickness

C356S625000

Reexamination Certificate

active

08064072

ABSTRACT:
The material strength of extensive objects can be determined efficiently by using two distance measures, wherein a first distance measurer determines the distance to a first main surface of the object and a second distance measurer determines the distance to a second main surface object opposing the first main surface. If potential measurement errors due to the extensive geometry are avoided by determining a reference distance between the first distance measurer and the second distance measurer by a reference object, the thickness of the object between the first main surface and the second main surface can be determined with high accuracy and velocity.

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