Method and apparatus for thermocapillary drying

Details Method and apparatus for thermocapillary drying Method and apparatus for thermocapillary drying

1999-04-27

2000-08-29

Gravini, Stephen

Drying and gas or vapor contact with solids

Material treated by electromagnetic energy

34310, 34351, 34442, 34 76, 34 78, 34 79, F26B 334

Patent

active

06108932&

ABSTRACT:
A method for thermocapillary drying of substrates includes the step of elevating a submerged substrate away from a rinsing liquid. Such movement of the substrate forms a meniscus on opposite sides of the substrate. The curved raised portion of the meniscus at each side of the substrate is gently heated in such a way as to induce thermocapillary flows, which cause the rinsing fluid to flow away from the substrate so that the withdrawing substrate may be pulled out dry and clean. Heating may be accomplished by directing a warm gas onto the meniscus or by heating the meniscus with rays from a radiation/light source. Apparatus is also provided for performing the various method steps.

REFERENCES:
patent: 4251268 (1981-02-01), Bok
patent: 5369891 (1994-12-01), Kamikawa
patent: 5539995 (1996-07-01), Bran
patent: 5571337 (1996-11-01), Mohindra et al.
patent: 5575079 (1996-11-01), Yokomizo et al.
patent: 5608974 (1997-03-01), Tanaka et al.
patent: 5657553 (1997-08-01), Tarui et al.
patent: 5685086 (1997-11-01), Ferrell
patent: 6004399 (1999-12-01), Wong et al.

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