Method and apparatus for thermally stabilizing workpieces

Details Method and apparatus for thermally stabilizing workpieces Method and apparatus for thermally stabilizing workpieces

1976-09-07

1979-02-13

Myhre, Charles J.

Heat exchange

Regenerator

Checker brick structure

29559, 165 80, 165133, 165185, 269 21, F28F 1318

Patent

active

041390512

ABSTRACT:
A method and apparatus for providing temporary thermal contact between a part being processed and a heat sink is disclosed. A tacky, insert, polymer film is applied to establish intimate contact with the part and the heat sink. Since the polymer layer has greater cohesive strength than adhesive strength, the part may be separated cleanly from the polymer film with substantially no contamination. The part does adhere with sufficient force to permit improved processing such as ion etching, sputter deposition and etching, ion beam deposition, vacuum evaporation, plasma etching, reactive ion etching, chemical vapor deposition, and ion implantation without overheating. The heat sink is mounted in a supporting fixture having pressure means and vacuum means associated therewith. The vacuum means is used for pulling the device wafer onto the coated heat sink. The pressure means is used to dismount the wafer from the heat sink without physical damage or contamination.

REFERENCES:
patent: 2935666 (1960-05-01), Van Namen
patent: 3187812 (1965-06-01), Staver
patent: 3301315 (1967-01-01), Webb
patent: 3509429 (1970-04-01), Craig et al.
patent: 3586102 (1971-06-01), Gilles
patent: 3617045 (1971-11-01), DaCosta

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