Thermal measuring and testing – Determination of inherent thermal property
Patent
1995-10-19
1998-08-18
Gutierrez, Diego F.F.
Thermal measuring and testing
Determination of inherent thermal property
374 44, G01N 2520, G01N 2518
Patent
active
057950636
ABSTRACT:
A system for evaluating the thermal impedance of packaged semiconductor chips. The measuring apparatus includes a thermostatic bath filled with a dielectric liquid and a temperature sensor for measuring the temperature of the bath. The semiconductor chip is subjected to a calibration step followed by a thermal response measurement step. Increasing the power pulse length allows measurement of the steady-state junction-to-case thermal resistance. The measuring apparatus and method is further used for tracing in-situ degradation of packaged semiconductor chips due to power cycling.
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Beyne Eric
Christiaens Filip
De Schepper Luc
Tielemans Luc
Gutierrez Diego F.F.
Interuniversitair Micro-Elektronica Centrum vzw
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