Method and apparatus for the production of crystalline...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth

Reexamination Certificate

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C117S034000, C117S200000, C117S205000, C117S922000

Reexamination Certificate

active

07608146

ABSTRACT:
An apparatus and method for producing a crystalline ribbon continuously from a melt pool of liquid feed material, e.g. silicon. The silicon is melted and flowed into a growth tray to provide a melt pool of liquid silicon. Heat is passively extracted by allowing heat to flow from the melt pool up through a chimney. Heat is simultaneously applied to the growth tray to keep the silicon in its liquid phase while heat loss is occurring through the chimney. A template is placed in contact with the melt pool as heat is lost through the chimney so that the silicon starts to “freeze” (i.e. solidify) and adheres to the template. The template is then pulled from the melt pool thereby producing a continuous ribbon of crystalline silicon.

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patent: 4329195 (1982-05-01), Kudo
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patent: 1 076 117 (2001-02-01), None
Zoutendyk, J.A.; “Theoretical Analysis of Heat Flow in Horizontal Ribbon Growth from a Melt,” J.Appl.Phys. 49(7); Jul. 1978; pp. 3927-3932.
Bleil, C.E.; “Float Zone Sheet Growth”; US Dept. of Energy Grant #DE-FG45-93R551901, (1996).
Kudo, B.; “Improvements in the Horizontal Ribbon Growth Technique for Single Crystal Silicon”; J.Cryst. Gr. 50 (1980); pp. 247-259.

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