Method and apparatus for the preparation of clean gases

Details Method and apparatus for the preparation of clean gases Method and apparatus for the preparation of clean gases

1998-03-19

1999-07-13

Spitzer, Robert

Gas separation: processes

Electric or electrostatic field

And nonelectrical separation of fluid mixture

95118, 95129, 95137, 95143, 95287, 96 52, 96 55, 96134, 553852, B01D 5304

Patent

active

059221054

ABSTRACT:
A method and apparatus for preventing contamination of a substrate or a substrate surface, and particularly relates to prevention of contamination of raw materials, semi-finished products, base materials of products and substrate surface in a high-tech industry such as in the production of semiconductors and liquid crystals. A gas coming into contact with a base material or substrate is purified by dust removing apparatus and adsorption and/or absorption apparatus so that the concentration of fine particles in the gas is below class 1,000 and a non-methane hydrocarbon concentration is below 0.2 ppm. Thereafter, the base material or the substrate surface is exposed to this gas.

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