Method and apparatus for the optical electronic measurement of a

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356387, G01B 902

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active

048547077

ABSTRACT:
An optical electronic method for the measuring of a workpiece is disclosed. A beam of radiation is used to illuminate an edge of the object to be measured to form an actual diffraction pattern. The actual diffraction pattern is converted to electronic signals by means of a sensor and correlated electronically with a predetermined theoretically calculated diffraction pattern.

REFERENCES:
patent: 3812376 (1974-05-01), Takeyama et al.
patent: 3937580 (1976-02-01), Kasuan
patent: 3941484 (1976-03-01), Dreyfus
patent: 4131365 (1978-12-01), Pryor
M. Born, E. Wolf, Principles of Optics, Pergamon Press, Oxford, 1975, pp. 428-430 and 432-435.

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