Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1988-06-27
1989-08-08
McGraw, Vincent P.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356387, G01B 902
Patent
active
048547077
ABSTRACT:
An optical electronic method for the measuring of a workpiece is disclosed. A beam of radiation is used to illuminate an edge of the object to be measured to form an actual diffraction pattern. The actual diffraction pattern is converted to electronic signals by means of a sensor and correlated electronically with a predetermined theoretically calculated diffraction pattern.
REFERENCES:
patent: 3812376 (1974-05-01), Takeyama et al.
patent: 3937580 (1976-02-01), Kasuan
patent: 3941484 (1976-03-01), Dreyfus
patent: 4131365 (1978-12-01), Pryor
M. Born, E. Wolf, Principles of Optics, Pergamon Press, Oxford, 1975, pp. 428-430 and 432-435.
Ackermann Helmut
Ring Manfred
Weber Jurgen
Georg Fischer Aktiengesellschaft
McGraw Vincent P.
Turner S. A.
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