Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-10-17
2006-10-17
Gandhi, Jayprakash N. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C710S063000
Reexamination Certificate
active
07123980
ABSTRACT:
An Advanced Process Control (APC) system including Graphical User Interfaces (GUIs) is presented for monitoring and controlling a semiconductor manufacturing process that is performed by a semiconductor processing system. The semiconductor processing system includes a number of processing tools, a number of processing modules (chambers), and a number of sensors, and the APC system comprises an APC server, database, interface server, client workstation, and GUI component. The GUI is web-based and is viewable by a user using a web browser.
REFERENCES:
patent: 5864773 (1999-01-01), Barna et al.
patent: 6263255 (2001-07-01), Tan et al.
patent: 6480854 (2002-11-01), Gross et al.
patent: 6571285 (2003-05-01), Groath et al.
patent: 6630362 (2003-10-01), Lensing
patent: 6819963 (2004-11-01), Riley et al.
patent: 6842660 (2005-01-01), Tripathi et al.
patent: 2002/0087229 (2002-07-01), Pasadyn et al.
patent: 2003/0061537 (2003-03-01), Cha et al.
patent: 2003/0169330 (2003-09-01), Ben-Shachar et al.
patent: 2003/0208294 (2003-11-01), Cheng et al.
patent: 2004/0135590 (2004-07-01), Quon
patent: WO 02/10873 (2002-02-01), None
patent: WO 02/066923 (2002-08-01), None
“Human Interface Standard for Semiconductor Equipment,” SEMI Draft Doc. #2783B, SEMI (Semiconductor Equipment and Materials International) (San Jose, CA), 15 pp., ( 1999).
“Specification for Human Interface for Semiconductor Manufacturing Equipment,” SEMI E95-1101, SEMI (Semiconductor Equipment and Materials International (San Jose, CA), 15 pp, (2000, 2001).
“Strategic Cell Controller (SCC) User-Interface Style Guide 1.0,” Technology Transfer 92061179A-ENG, SEMATECH, Inc. (Austin, TX), 204 pp, ( Aug. 21, 1992).
“ETCH Systems Advanced Process Control: Installation/Startup Manual, Revision 1.0.2,” Tokyo Electron America, Inc. (Austin, TX), 161 pp., ( Jul. 9, 2002).
Funk Merritt
Peterson Raymond
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