Method and apparatus for the manufacturing of reticles

Details Method and apparatus for the manufacturing of reticles Method and apparatus for the manufacturing of reticles

2005-08-16

2005-08-16

Angebranndt, Martin (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S945000, C430S321000, C219S121770, C219S121680, C219S121810, C219S121820

Reexamination Certificate

active

06929886

ABSTRACT:
A method and apparatus for manufacturing patterns on a reticle blank comprising a substrate made from material transparent to UV irradiation and having a first surface and a second opposite surface, the first surface coated with a chrome layer. The method comprises providing ultra-short pulsed laser beams, focusing means, relative displacement facilitator for facilitating relative displacement of the reticle blank relative to said at least one of a plurality of target locations, and a controller for controlling the synchronization and operation of the laser beam source, the focusing means and the relative displacement facilitator. Ultra-short pulsed laser beam is irradiated in a predetermined pattern directed at the second surface and passing through the substrate, focused on the chrome layer or on its proximity.

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