Method and apparatus for the fabrication of lightweight semicond

Adhesive bonding and miscellaneous chemical manufacture – Surface bonding means and/or assembly means therefor – With means applying wave energy or electrical energy...

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Details

156390, 156510, 156584, 156254, 1562728, 156247, 156344, 438 62, 438484, 2191216, 21912165, 21912167, B32B 3128, B23K 2600

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active

061361410

ABSTRACT:
Lightweight semiconductor devices are fabricated upon a relatively thin substrate member by a process wherein the substrate is first bonded to a relatively thick support member. The semiconductor device is then formed on the bonded substrate, and the substrate is subsequently removed from the support member by utilizing a beam of radiant energy to skive the substrate from the support member without damage to the semiconductor device. Also disclosed herein is a system for implementing the invention.

REFERENCES:
patent: 4185185 (1980-01-01), Adlam
patent: 4328410 (1982-05-01), Slivinsky et al.
patent: 4341588 (1982-07-01), Sterling
patent: 4379020 (1983-04-01), Glaeser et al.
patent: 4663829 (1987-05-01), Hartman et al.
patent: 5378639 (1995-01-01), Sasaki et al.

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