Method and apparatus for the evaluation of a depth profile of th

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – By loading of specimen

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73800, G01L 124

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058472835

ABSTRACT:
A technique for determining properties such as Young's modulus, coefficient of thermal expansion, and residual stress of individual layers within a multi-layered sample is presented. The technique involves preparation of a series of samples, each including one additional layer relative to the preceding sample. By comparison of each sample to a preceding sample, properties of the topmost layer can be determined, and residual stress at any depth in each sample, resulting from deposition of the top layer, can be determined.

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