Method and apparatus for the electrolytic preparation of group I

Details Method and apparatus for the electrolytic preparation of group I Method and apparatus for the electrolytic preparation of group I

1991-03-22

1992-10-27

Valentine, Donald R.

Chemistry: electrical and wave energy

Processes and products

Electrostatic field or electrical discharge

204103, 204230, 204242, 204284, 204291, 204292, 204293, 204290F, C25B 102, C25B 900

Patent

active

051586568

ABSTRACT:
An electrochemical apparatus and method for supplying volatile hydrides of sufficient purity, at the proper pressure, and in the required volume, for direct introduction into a chemical vapor deposition reactor in which semiconductors are manufactured and doped.

REFERENCES:
patent: 1375819 (1921-04-01), Blumenberg, Jr.
patent: 3404076 (1968-10-01), Haycock et al.
patent: 3732157 (1973-05-01), Dewitt
patent: 3755128 (1973-08-01), Herwig
patent: 3870616 (1975-03-01), Dempsey et al.
patent: 4113601 (1978-09-01), Spirig
patent: 4115238 (1978-09-01), Cipris
patent: 4964966 (1990-10-01), Moreland et al.

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