Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2007-11-20
2007-11-20
Wilkins, III, Harry D (Department: 1753)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S22400M, C204S279000, C204S284000, C204S288100
Reexamination Certificate
active
10921666
ABSTRACT:
An electrochemical apparatus is provided which deposits material onto or removes material from the surface of a workpiece. The apparatus comprises a polishing pad and a platen which is in turn comprised of a first conductive layer in contact with the polishing pad and coupled to a first potential, a second conductive layer coupled to a second potential, and a first insulating layer disposed between the first and second conductive layers. At least one electrical contact is positioned within the polishing pad and is electrically coupled to the second conductive layer. A reservoir is provided which places an electrolyte solution in contact with the polishing pad and the workpiece. A carrier positions and/or presses the workpiece against the polishing pad.
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Emesh Ismail
Gopalan Periya
Palmer Bentley J.
Rayer, II Phillip M.
Ingrassia Fisher & Lorenz P.C.
Novellus Systems Inc.
Wilkins, III Harry D
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