Method and apparatus for the detection of hydrogen using a metal

Measuring and testing – Gas analysis – With compensation detail

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Details

73 3106, 324 715, 324 693, 296101, 29 2501, 422 83, 422 98, 338 34, 436151, H01L 2966, G01N 2726

Patent

active

056683014

ABSTRACT:
A hydrogen sensitive metal alloy contains palladium and titanium to provide a larger change in electrical resistance when exposed to the presence of hydrogen. The alloy is deposited on a substrate and a thin film and connected across electrical circuitry to provide a sensor device that can be used for improved sensitivity and accuracy of hydrogen detection.

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