Etching a substrate: processes – Nongaseous phase etching of substrate
Reexamination Certificate
2007-11-20
2007-11-20
Farah, A. (Department: 3735)
Etching a substrate: processes
Nongaseous phase etching of substrate
C216S052000, C216S056000
Reexamination Certificate
active
11175878
ABSTRACT:
The present invention discloses a method and apparatus for the directed formation of a re-entrant micro-jet formed upon the collapse of a working cavitation bubble formed proximate to a work surface. A target bubble, formed between the work surface and the working cavitation bubble, is utilized to direct the re-entrant micro-jet to the work surface.
REFERENCES:
patent: 4231657 (1980-11-01), Iwamatsu
patent: 4759894 (1988-07-01), McCorkle
patent: 5057184 (1991-10-01), Gupta et al.
patent: 5437729 (1995-08-01), Boatner et al.
patent: 6139543 (2000-10-01), Esch et al.
patent: 6932914 (2005-08-01), LeClair
patent: 6960307 (2005-11-01), LeClair
patent: 2002/0034610 (2002-03-01), Perez et al.
patent: 2002/0045977 (2002-04-01), Fletcher et al.
patent: 2004/0004055 (2004-01-01), Barros
patent: 2004/0054357 (2004-03-01), O'Donnell
patent: 2005/0064137 (2005-03-01), Hunt et al.
Akhatov et al, Collapse and Rebound of Laser Induced Cavitation Bubble, CAV2001: Fourth International Symposium on Cavitation, California Institute of Technology, Jun. 20-23, 2001.
Ishida et al, Cavitation Bubble Behavior Near Solid Boundaries, CAV2001: Fourth International Symposium on Cavitation, California Institute of Technology, Jun. 20-23, 2001.
Blake et al, Boundary Integral Methods for Cavitation Bubbles Near Boundaries, CAV2001: Fourth International Symposium on Cavitation, California Institute of Technology, Jun. 20-23, 2001.
Baghdassarain et al, Spectrum of Luminescence from Laser Induced Bubbles in Water and Cryogenic Fluids, CAV2001: Fourth International Symposium on Cavitation, California Institute of Technology, Jun. 20-23, 2001.
Tomita et al, Energy Evaluation of Schock Wave Emission and Bubble Generation by Laser Focussing in Liquid Nitrogen, CAV2001:Fourth International Symposium on Cavitation, California Institute of Technology, Jun. 20-23, 2001.
Christopher E. Brennen, Cavitation ad Bubble Dynamics, Oxford U. Press, NY NY, 1995, pp. 70-76.
Farah A.
Lorimer D'Arcy H.
Lorimer Labs
LandOfFree
Method and apparatus for the controlled formation of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for the controlled formation of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for the controlled formation of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3825115