Etching a substrate: processes – Mechanically shaping – deforming – or abrading of substrate
Reexamination Certificate
2005-08-23
2005-08-23
Farah, A. (Department: 3739)
Etching a substrate: processes
Mechanically shaping, deforming, or abrading of substrate
C216S056000, C216S083000, C216S094000, C219S121200, C219S121430, C219S121690, C606S002000
Reexamination Certificate
active
06932914
ABSTRACT:
The present invention discloses a method and apparatus for the directed formation of a re-entrant micro-jet formed upon the collapse of a working cavitation bubble formed proximate to a work surface. A target bubble, formed between the work surface and the working cavitation bubble, is utilized to direct the re-entrant micro-jet to the work surface.
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Farah A.
Hamrick Claude A. S.
Lorimer D'Arcy H.
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