Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1988-03-03
1990-12-25
Smith, Jerry
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
250310, 2504922, 324158D, G01R 1702, G01R 1910, G01R 1912, G01R 3126
Patent
active
049806394
ABSTRACT:
A method and apparatus for testing an integrated electronic device wherein the integrated electronic device to be tested is placed on a sample table. A predetermined position of the integrated electronic device is irradiated with the primary charged beam. A substrate current flowing through a substrate of the integrated electronic device is measured upon radiation of the primary charged beam, and then a potential of the predetermined position irradiated with the primary charged beam is nondestructively measured in accordance with secondary electrons emitted from the predetermined position. A function of the integrated electronic device is evaluated in accordance with the substrate current and the predetermined position potential. The function to be evaluated include leakage characteristics and a capacitance.
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Fujinami Minpei
Kikuchi Akira
Shimazu Nobuo
Wada Kou
Yoshizawa Masahiro
Baker Stephen M.
Nippon Telegraph and Telephone Public Corporation
Smith Jerry
VanOphem Remy J.
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