Method and apparatus for testing gate oxide with fuse

Details Method and apparatus for testing gate oxide with fuse Method and apparatus for testing gate oxide with fuse

2006-11-14

2006-11-14

Benson, Walter (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S550000

Reexamination Certificate

active

07135868

ABSTRACT:
An apparatus and method for testing a dielectric layer. The apparatus includes a first conductive plate and a second conductive plate. The first conductive plate and the second conductive plate are in direct contact with a dielectric layer. Additionally, the apparatus includes a first conductive wire connected to the first conductive plate and biased to a first predetermined voltage, and a second conductive wire connected to the second conductive plate and a voltage detector. Moreover, the apparatus includes a fuse connected to the second conductive wire, and a third conductive wire connected to the fuse and a device capable of providing a second predetermined voltage and measuring a current.

REFERENCES:
patent: 4567428 (1986-01-01), Zbinden
patent: 6781401 (2004-08-01), Kim
patent: 7053644 (2006-05-01), Lindsey et al.
patent: 2005/0212547 (2005-09-01), Suzuki

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