Optical: systems and elements – Prism
Patent
1995-01-04
1997-07-08
Dzierzynski, Paul M.
Optical: systems and elements
Prism
359837, 359618, 359623, 359238, 359236, 359298, G02B 504, G02B 2710, G02B 2600, G02B 2608
Patent
active
056467915
ABSTRACT:
A method and apparatus for providing sequential temporal and spatial integration of a collimated non-symmetrical excimer laser beam to optimize the temporal and spatial characteristics of the beam. The temporal integrator comprises a pair of cylindrical lenses spaced along the beam axis by a distance substantially equal to the sum of the focal length of both lenses, and a motor mechanism for rotating the two spaced cylindrical lenses about the beam axis. The spatial beam integrator includes a plurality of prisms distributed about a hollow center, the outlet face of each prism being angled with respect to the body axis of the spatial beam integrator so that portions of the laser beam passing through a given prism are refracted towards the center upon emergence from the outlet face. The spatial beam integrator is preferably rotated about the beam axis at twice the rotation rate of the cylindrical lenses so that the rotated beam emerging from the temporal beam integrator is stationary with respect to the spatial beam integrator. Alternatively, the spatial beam integrator may be rotated at the same rate as the cylindrical lenses, or may be maintained stationary, i.e., not rotated at all.
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Description of 2020B Optical Schematic (0019-5720).
Schematic Diagram Drawing No. 00195720 dated Oct. 16, 1987.
Dzierzynski Paul M.
Sikd-er Mohammad Y.
VISX Incorporated
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