Method and apparatus for temperature measurement using thermal e

Details Method and apparatus for temperature measurement using thermal e Method and apparatus for temperature measurement using thermal e

1991-05-20

1993-06-22

Cuchlinski, Jr., William A.

Thermal measuring and testing

Temperature measurement

In spaced noncontact relationship to specimen

374 55, 356357, G01K 550, G01B 1102

Patent

active

052211428

ABSTRACT:
An apparatus and method for determining the temperature of an object, such as a semiconductor wafer by measuring the physical change in a dimension of the semiconductor wafer is disclosed. This physical change is then correlated to the temperature using the coefficient of thermal expansion for the wafer.

REFERENCES:
patent: 2573686 (1951-11-01), Blinn et al.
patent: 4253304 (1981-03-01), Lamb et al.
patent: 4381152 (1983-04-01), Riech et al.
patent: 4534645 (1985-08-01), Nohda
patent: 4604572 (1986-08-01), Horiuchi et al.
patent: 4636088 (1987-01-01), Rosenewaig et al.
patent: 4636969 (1987-01-01), Kyoden et al.
patent: 4671651 (1987-06-01), Toyoda et al.
patent: 4764026 (1988-08-01), Powell et al.
patent: 4823291 (1989-04-01), Berman
patent: 4854731 (1989-08-01), Jenkins
patent: 4890245 (1989-12-01), Yomoto et al.
patent: 4919542 (1990-04-01), Nulman et al.
patent: 4924477 (1990-05-01), Gilmore et al.
patent: 4964726 (1990-10-01), Kleinknecht et al.
patent: 4969748 (1990-11-01), Crowley et al.
patent: 4979133 (1990-12-01), Arima et al.
patent: 4979134 (1990-12-01), Arima et al.
patent: 4989980 (1991-02-01), Berg
Tech Notes and Product Literature of Orton, Edward Orton Jr. Ceramic Foundation, Westerville, Ohio, USA.
"Rapid thermal processing systems: A review with emphasis on temperature control", Fred Roozeboom, J. Vac. Sci. Technol. B 8 (6), Nov./Dec. 1990.

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