Method and apparatus for temperature controlled spin-coating sys

Details Method and apparatus for temperature controlled spin-coating sys Method and apparatus for temperature controlled spin-coating sys

1997-02-27

1999-06-29

Simmons, David A.

Coating apparatus

Work holders, or handling devices

269 21, 118 52, 118319, 279 3, B05C 2100, B05B 1100, B23B 522

Patent

active

059163682

ABSTRACT:
Disclosed is method and apparatus for distributing a chemical over the surface of a substrate. The method includes depositing the chemical on a portion of the surface of a substrate near the center of the substrate. The method further includes controlling the temperature of the surface of a substrate so that the viscosity of the chemical is calibrated to cause the chemical to be deposited on the surface of the substrate in a substantially uniform manner.

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