Method and apparatus for temperature control of a semiconductor

Details Method and apparatus for temperature control of a semiconductor Method and apparatus for temperature control of a semiconductor

1998-01-27

2000-07-18

Paschall, Mark

Electric heating

Heating devices

With power supply and voltage or current regulation or...

219209, 219494, 438715, 324760, H05B 102

Patent

active

060910623

ABSTRACT:
A semiconductor device handler with a temperature controlled test area. Temperature control is provided in part through the use of temperature controlled air forced across the test area. For heating the test area, electrical resistance heaters are uniformly distributed through the test area and are controlled to provide the desired temperature. The handler has a close pitch between adjacent sockets such that is not possible to distribute refrigeration elements over the test area. Instead, a refrigeration element is placed on one side of the test area. To prevent formation of an undesirable temperature gradient, heat is injected at a specific location in the test area.

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