Method and apparatus for surveying the surface of an object by p

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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356376, G01N 2186

Patent

active

050031872

ABSTRACT:
For sensing the surface of an object, a number of gratings with linear line patterns of different periods on a common carrier are successively projected onto the surface. Images of the line patterns deformed at the object surface are detected and stored by a television camera and evaluated by an electronic circuit. The evaluation comprises computing, from the residual phases of the object points within each fringe of the linear pattern, the absolute heights of these points with respect to a common reference plane.

REFERENCES:
patent: 4895448 (1990-01-01), Laird
"Interferometric Optical Phase Measurement Techniques", Dissertation of C. L. Koliopoulos, Univ. of Arizona, 1981.

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