Method and apparatus for surface profilometry

Details Method and apparatus for surface profilometry Method and apparatus for surface profilometry

1984-09-14

1987-02-10

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

250237G, 356375, G01B 1124

Patent

active

046419721

ABSTRACT:
Phase measurements of deformed grating images are used in performing improved optical profilometry. In one embodiment, phase differences between images of an object and a reference plane are used to obtain a measure of the object height.

REFERENCES:
patent: 3627427 (1971-12-01), Johnson et al.
patent: 3879133 (1975-04-01), Mathieu
patent: 4188124 (1980-02-01), Jaerisch et al.
patent: 4191476 (1980-03-01), Pollard
patent: 4212073 (1980-07-01), Balasubramanian
patent: 4349277 (1982-09-01), Mundy et al.
Cline et al, Applied Optics, vol. 21, No. 24, Dec. 12, 1982, pp. 4481-4488.

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