Method and apparatus for surface inspection in a chamber

Details Method and apparatus for surface inspection in a chamber Method and apparatus for surface inspection in a chamber

1996-11-01

1999-08-17

Hantis, K. P.

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

G01N 2100

Patent

active

059401753

ABSTRACT:
An inspection system for inspecting products that have a flat, reflective surface, such as a wafer or a flat panel display on which a thin film is to be deposited, includes an inspection chamber connected to a processing chamber with both of the chambers being under vacuum. The inspection equipment performs the inspection with the product in the inspection chamber without removing the product from the vacuum environment. In a preferred form of the invention, the inspection chamber includes a wall portion that will transmit light, and the inspection equipment is a laser source directed to the reflective surface of the product and a receiver for receiving reflected light to determine changes in the character of the surface caused by the deposited film or by imperfections, haze or particles.

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