Method and apparatus for supporting a substrate

Details Method and apparatus for supporting a substrate Method and apparatus for supporting a substrate

2006-04-18

2006-04-18

Trinh, Minh (Department: 3729)

Metal working

Means to assemble or disassemble

Means to assemble electrical device

C029S281600, C029S03300H, C029S744000, C029S832000, C269S266000, C269S310000

Reexamination Certificate

active

07028391

ABSTRACT:
An apparatus for performing operations on at least one surface of an electronic substrate having a first surface and a second surface includes a frame, a transportation system that moves the substrate through the apparatus, a substrate support system, coupled to the frame, having a non-rigid portion that contacts and supports the substrate during an operation on the substrate, wherein the non-rigid portion allows flexure of the substrate before and during the performance of an operation on the substrate, and a device coupled to the frame that performs an operation on a surface of the substrate.

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