Method and apparatus for supply of liquid raw material gas

Details Method and apparatus for supply of liquid raw material gas Method and apparatus for supply of liquid raw material gas

1995-07-28

1997-12-02

Kim, Christopher

Distillation: processes, separatory

With measuring, testing or inspecting

Of concentration

261130, 261 28, B01D 342

Patent

active

056931891

ABSTRACT:
The mixed gas of a liquid raw material is stably supplied to not only one reactor but also a plurality of reactors as maintained with high purity at a fixed concentration. A method to supply a liquid raw material gas by the steps of storing a liquid raw material 31 in a bubbling tank 13 with maintaining the stored liquid raw material at a controlled temperature, bubbling a carrier gas 41 through the liquid raw material 31 thereby evaporating the liquid raw material and simultaneously generating a mixed gas composed of the carrier gas 41 and the liquid raw material 31, subjecting the mixed gas to a condensation treatment, and returning the liquefied liquid raw material 31 to the bubbling tank 13 and meanwhile supplying the mixed gas escaped from the liquefaction to a reactor(s), which method is characterized in that the condensation treatment of the mixed gas is carried out with the pressure and temperature thereof controlled at fixed levels, thereby the concentration of the mixed gas supplied to a reactor(s) is kept at a fixed level.

REFERENCES:
patent: 3095463 (1963-06-01), Chang et al.
patent: 3901182 (1975-08-01), Chiang
patent: 4276243 (1981-06-01), Partus
patent: 4393013 (1983-07-01), McMenamin
patent: 4582480 (1986-04-01), Lynch et al.
patent: 5520858 (1996-05-01), Yamaguchi et al.
Patent Abstracts of Japan No. JP A 04341340 Nov. 27, 1992.
Patent Abstract of Japan No. JPA 04243535 Aug. 31, 1992.

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