Method and apparatus for supercritical ozone treatment of a...

Details Method and apparatus for supercritical ozone treatment of a... Method and apparatus for supercritical ozone treatment of a...

2007-05-22

2007-05-22

Barr, Michael (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

C134S100100, C134S902000

Reexamination Certificate

active

10343734

ABSTRACT:
Disclosed is a method and apparatus for treating a substrate with a reaction solvent formed of supercritical ozone in a feed phase. The feed phase can be aqueous, e.g., formed of heated, deionized water, nonaqueous, e.g., formed of a dense fluid, such as supercritical carbon dioxide, liquid carbon dioxide, supercritical nitrogen or combinations the dense fluids or the feed phase can be a mixture of aqueous and nonaqueous phases.

REFERENCES:
patent: 6242165 (2001-06-01), Vaartstra
patent: 6532974 (2003-03-01), Kashkoush et al.
patent: 6558477 (2003-05-01), Scovell
patent: WO-96/23606 (1996-08-01), None

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